Makimura Tetsuya

Researcher's full information

Conference, etc.

• Responses of polymers to laser plasma EUV light beyond ablation threshold and micromachining
  Makimura Tetsuya; Torii Shuichi; Okazaki Kota; Nakamura ...
  Conference on Damage to VUV, EUV, and X-ray Optics III/2011-04-18--2011-04-20
• Ablation of inorganic materials using laser plasma soft X-rays
  Makimura Tetsuya; Fujimori Takashige; Uchida Satoshi; Mur...
  Conference on Damage to VUV, EUV and X-Ray Optics
• 1.5 mu m light emission of Er 31 ions doped in SiO2 films including Si nanocrystallites and in SiOx films
  Makimura Tetsuya; Uematsu Hiroshi; Okada Yuuki; Murakami ...
  8th International Conference on Laser Ablation
• Direct nanomachining of inorganic transparent materials using laser plasma soft x-rays
  Makimura Tetsuya; Miyamoto Hisao; Uchida Satoshi; Niino ...
  8th International Conference on Laser Ablation
• Ablation process of silica glass induced by laser plasma soft X-ray irradiation
  Torii Shuichi; Fujimori Takashige; Makimura Tetsuya; Niin...
  6th International Conference on Photo-Excited Processes and Applications
• Nano- and micromachining of transparent materials using laser plasma soft X-Rays
  Makimura Tetsuya; Torii Shuichi; Niino Hiroyuki; Murakami...
  8th Pacific Rim Conference on Lasers and Electro-Optics
• Ablation of silica glass using pulsed laser plasma soft X-rays
  Makimura T; Kenmotsu Y; Miyamoto H; Niino H; Murakami K
  10th International Workshop on Desorption Induced by Elebtronic Transitions
• Nano-ablation of inorganic materials using laser plasma soft X-rays at around 10nm
  Makimura Tetsuya; Miyamoto Hisao; Uchida Satoshi; Fujimor...
  18th International Microprocesses and Nantechnology Conference